Heteroepitaxial InP Growth on a Si(001) Substrate Using a Ge Buffer Layer in MOCVD
2023 7TH IEEE ELECTRON DEVICES TECHNOLOGY & MANUFACTURING CONFERENCE, EDTM（2023）
Key words
Heteroepitaxy,InP and germanium
AI Read Science
Must-Reading Tree
Example
Generate MRT to find the research sequence of this paper
Chat Paper
Summary is being generated by the instructions you defined