Wavelength-multiplexed Multi-mode EUV Reflection Ptychography Based on Automatic-Differentiation
Light Science & Applications（2024）
Key words
Ptychography,Extreme Ultraviolet Lithography,Adaptive Optics,Wavefront Sensing,Diffraction Microscopy
AI Read Science
Must-Reading Tree
Example
Generate MRT to find the research sequence of this paper
Chat Paper
Summary is being generated by the instructions you defined