Size-Scaling Effect on Domain Switching Time and Coercive Field of TiN/Hf0.5Zr0.5O2/TiN Thin-Film Capacitors
IEEE TRANSACTIONS ON ELECTRON DEVICES（2023）
关键词
Coercive field,Hf0.5Zr0.5O2 (HZO) thin film,interfacial layer,TiN electrode
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