An Apertureless Scanning Near-Field Optical Microscope Probe with a Lateral Resolution of 10 – 15 Nm Observed with a Semiconductor Structure

D. V. Kazantsev,A. V. Klekovkin,I. I. Minaev,E. A. Kazantseva,S. N. Nikolaev

JOURNAL OF RUSSIAN LASER RESEARCH（2023）

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Key words

Scanning near-field optical microscopy (SNOM),scanning probe microscopy (SPM),apertureless SNOM (ASNOM),nanostructure,ASNOM of elastic light scattering (sSNOM)

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