Large-Area Sub-5nm Plasmonic Nanogap Arrays: Advanced Fabrication, Characterization and Applications
2023 Conference on Lasers and Electro-Optics Europe & European Quantum Electronics Conference (CLEO/Europe-EQEC)（2023）
Key words
ALD,atomic layer deposition,localized surface plasmon resonances,LSPR,metasurfaces,optically induced electron transitions,plasmonic nanogap arrays,size 5.0 nm
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