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Prediction by a Hybrid Machine Learning Model for High-Mobility Amorphous In2O3: Sn Films Fabricated by RF Plasma Sputtering Deposition Using a Nitrogen-Mediated Amorphization Method

Kunihiro Kamataki, Hirohi Ohtomo,Naho Itagaki, Chawarambawa Fadzai Lesly,Daisuke Yamashita,Takamasa Okumura,Naoto Yamashita,Kazunori Koga,Masaharu Shiratani

JOURNAL OF APPLIED PHYSICS（2023）

引用 3|浏览25
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