The influence of different ratio of Ar and C₆H₆ gases and ion bombardment on the growth rate and sp³ bonds content in DLC-coatings synthesized in RF discharge

A. Omarov,A. Kalinichenko,V. Strel'nitskij,I. U. Nasieka,I. Danylenko,M. Boyko,T. Sabov

Physics Letters A（2022）

Nat Sci Ctr Kharkov Inst Phys & Technol

Cited 0|Views4

Abstract

The radio-frequency discharge growth of diamond-like carbon coatings from the Ar + C6H6 gas was theoretically analyzed with the aim to evaluate the role of Ar+ ions and C6H6+ ionized molecules bombardment on the growth rate and sp(2)/sp(3) carbon phase composition. It has been shown that the growth rate changes nonlinearly with the increase of argon content in the gas. Firstly, it increases from 1.9 mu m/h at P-Ar/(P-Ar+ P-benzol) = 0.033 up to 2.15 mu m/h at P-Ar/(P-Ar+ P-benzol) = 0.5 with further rapid decrease down to 0.57 mu m/h at P-Ar/(P-Ar+ P-benzol) = 0.967. By using theoretical calculations as well as experimental methods it has been shown that sp(3) content in the coatings increases within the range 0.31... 0.41with increase in the relative partial pressure of argon. (c) 2022 The Author(s). Published by Elsevier B.V. This is an open access article under the CC BY-NC-ND license (http://creativecommons.org/licenses/by-nc-nd/4.0/).

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Key words

DLC coatings,Deposition rate,sp(3) bonds concentration,Raman scattering,Photoluminescence,XPS

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The influence of different ratio of Ar and C6H6 gases and ion bombardment on the growth rate and sp3 bonds content in DLC-coatings synthesized in RF discharge

The influence of different ratio of Ar and C₆H₆ gases and ion bombardment on the growth rate and sp³ bonds content in DLC-coatings synthesized in RF discharge