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Study of the Temporal Stability of the Reflection Coefficient in the Vicinity of 58.4 Nm of Narrow-Band Sc/Al Mirrors with Si or ScNx Interlayers and a MoSi2 Protective Cap Layer

N. I. Chkhalo,M. N. Drozdov,A. Ya. Lopatin,V. I. Luchin,N. N. Salashchenko,S. Yu. Zuev,N. N. Tsybin

THIN SOLID FILMS（2023）

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关键词
Multilayer mirror,Temporal stability,Aluminum,Scandium,Extreme ultraviolet,Microstructure,Impurities,Spectral width
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