Specific On-Resistance Reduction for the LDMOS Using Separated Composite Dielectric Trenches

Jiafei Yao,Tianci Xu,Mingshun Sun, Xin Liu,Kemeng Yang,Man Li,Jing Chen,Maolin Zhang,Jun Zhang,Yufeng Guo

IEEE TRANSACTIONS ON ELECTRON DEVICES（2024）

引用 8|浏览6

关键词

Dielectrics,Logic gates,Metals,Electric fields,High-k dielectric materials,Etching,Doping,Breakdown voltage,high-k dielectric,separated composite dielectric trenches,specific ON-resistances

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