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Direct Patterning of Functional Materials Using Nanoimprint Lithography

Michael J. Haslinger,Sonja Kopp, Voktorija Jonaityte,Amiya Moharana,Helene Außerhuber,Michael Mühlberger

38th European Mask and Lithography Conference (EMLC 2023)（2023）

Cited 0|Views5
Key words
Nanoimprint Technology,Nanolithography,Nanolithography Techniques,Patterning Materials,Nanoscale Patterning
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