Fully Automated AI Based Crack Detection on Pad-Over-Active-Areas

D. Pfister, F. Felux,C. Hollerith,A. Jansche, M. O. Volman Stern

International Symposium for Testing and Failure Analysis ISTFA 2023 Conference Proceedings from the 49th International Symposium for Testing and Failure Analysis（2023）

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Automated Inspection,Surface Defect Detection,Fabric Defect Detection,Wafer Map Defect Classification

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