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Nano-Mapping of Vertical Contact Electrodes Using Synchrotron Scanning Photoelectron Microscopy

Minseon Gu,Hansol Jang, Hanyeol Ahn,Hyuk Jin Kim,Moon Seop Hyun,Yun Chang Park,In Hye Kwak, Sangwoo Nam, Jaehui Im,Jaeyoon Baik,Hyun-Joon Shin,Moonsup Han,Gyungtae Kim,Young Jun Chang

Applied Surface Science（2024）

Cited 3|Views1
Key words
Scanning photoelectron microscopy (SPEM),High aspect ratio contact hole,Nanoscale inspection methodology,Focused X-ray beam
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