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Manipulating the Processing Window of Directed Self-Assembly in Contact Hole Shrinking with Binary Block Copolymer/Homopolymer Blending

Zhiyong Wu, Jiacheng Luo,Luyang Li,Qingshu Dong,Xiaohui Zhang,Zili Li,Yadong Liu,Shengxiang Ji,Weihua Li, Yan Zhang,Shisheng Xiong

ISCIENCE（2024）

Cited 0|Views22
Key words
Directed self-assembly,Graphoepitaxy,Contact hole shrinking,Block Copolymer/Homopolymer Blending,Self-consistent field theory (SCFT)
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