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Crystallinity and Composition of Sc / Si:P System for Advanced Contact Applications

Bert Pollefliet,Clement Porret,Jean-Luc Everaert,Kiroubanand Sankaran,Xiaoyu Piao,Erik Rosseel,Thierry Conard, Andrea Impagnatiello,Yosuke Shimura,Andriy Hikavyy,Roger Loo,André Vantomme,Clement Merckling

Extended Abstracts of the 2023 International Conference on Solid State Devices and Materials（2023）

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