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Fault Prediction of Molecular Pump Based on DE-Bi-LSTM

Yang Zhou, Ming Jiang,Xiaolin Yuan,Guizhong Zuo,Yue Chen,Jilei Hou,Kai Jia, Peng Liu, Zhixin Cheng

FUSION SCIENCE AND TECHNOLOGY（2024）

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Key words
Molecular pump,vacuum leak,time domain analysis,DE-Bi-LSTM,fault prediction
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