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Electron Scattering on Finite-Temperature Quantum Screened Potential

C. Chen,G. P. Zhao,Z. B. Chen,Y. Y. Qi, L. Liu, Y. Wu,J. G. Wang

PHYSICS OF PLASMAS（2023）

Cited 2|Views1
Key words
Quantum Plasma Physics,Low Temperature Plasmas,Plasma Etching,Atomic Layer Etching,Electron Energy Distribution Function
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