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Graphene-All-Around Cobalt Interconnect with a Back-End-of-Line Compatible Process.

Chi-Yuan Kuo, Jia-Heng Zhu, Yun-Ping Chiu,I-Chih Ni,Mei-Hsin Chen,Yuh-Renn Wu,Chih- Wu

NANO LETTERS（2024）

引用 1|浏览22
关键词
Co interconnects,graphene-all-around,BEOLcompatible,electromigration,reliability
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