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Crafting Chirality in Three Dimensions Via a Novel Fabrication Technique for Bound States in the Continuum Metasurfaces

Light Science & Applications(2024)

Department of Electrical & Computer Engineering | Department of Mechanical & Aerospace Engineering

Cited 1|Views4
Abstract
An additional deposition step was added to a multi-step electron beam lithographic fabrication process to unlock the height dimension as an accessible parameter for resonators comprising unit cells of quasi-bound states in the continuum metasurfaces, which is essential for the geometric design of intrinsically chiral structures.
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要点】:本文提出了一种新型三维制造技术,通过增加额外的沉积步骤,使高度维度成为可用于准束缚态元表面共振器设计的参数,实现了连续域中束缚态的立体手性结构制造。

方法】:作者在多步骤电子束光刻制造过程中增加了一个额外的沉积步骤,以此将高度维度参数化,为设计内在手性结构提供了新的途径。

实验】:文中未具体描述实验过程和数据集,但提到该技术能够制造出手性的三维元表面结构,并推测这些结构可能表现出独特的光学性质。