Crafting Chirality in Three Dimensions Via a Novel Fabrication Technique for Bound States in the Continuum Metasurfaces
Light Science & Applications(2024)
Department of Electrical & Computer Engineering | Department of Mechanical & Aerospace Engineering
Abstract
An additional deposition step was added to a multi-step electron beam lithographic fabrication process to unlock the height dimension as an accessible parameter for resonators comprising unit cells of quasi-bound states in the continuum metasurfaces, which is essential for the geometric design of intrinsically chiral structures.
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