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Formation Mechanism of Passivation Layer under Air Exposure on TiZrV Non-Evaporable Getter Film

Qingzhi Shi,Sihui Wang,Shiyuan Shi,Pengcheng Wang,Yongsheng Ma,Tao Huang, Biao Tan,Fei Sun,Tao H uang,Lixin Wang, Meitong Lu, Shuping Chen,Xiaoguang Zhao

JOURNAL OF PHYSICAL CHEMISTRY C（2024）

Cited 2|Views20
Key words
Thin Film Growth,Atomic Layer Deposition
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