Nonlinear Mode Coupling Coefficient Extraction in Atomically Thin Mos2 Nanoelectromechanical Resonators
2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)（2024）
关键词
Nonlinear dynamics,resonator,mode coupling,nanoelectromechanical systems (NEMS),molybdenum disulfide (MoS2),two-dimensional (2D) materials
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