Fabrication of 3D Microstructures by Controlled Bending of Suspended Microdisks

R. Feougier,A. Aliane, A. Sarrazin, Z. Mehrez,N. Posseme,R. Tiron

NOVEL PATTERNING TECHNOLOGIES 2024（2024）

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Key words

3D patterning,suspended microdisks,controlled bending,hierarchical structures

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