Back-End of Line Compatible Hf0.5Zr0.5O2/ZrO2/Hf0.5Zr0.5O2 Stack Achieving 2pr of 39.6 Μc/cm2 and Endurance Exceeding 1010 Cycles under Low-Voltage Operation
IEEE ELECTRON DEVICE LETTERS（2024）
关键词
Back end of line,ZrO2 middle layer,remnant polarization,reliability,low-voltage operation
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