An Experimental and Computational Study on the Ignition Process of a Pulse Modulated Dual-Rf Capacitively Coupled Plasma Operated at Various Low-Frequency Voltage Amplitudes
PLASMA SOURCES SCIENCE & TECHNOLOGY（2024）
关键词
pulse modulated capacitively coupled dual RF discharge,RF excitation,ignition phase
AI 理解论文
溯源树
样例
生成溯源树，研究论文发展脉络
Chat Paper
正在生成论文摘要