Low Mechanical Loss and High Refractive Index in Amorphous Ta2O5 Films Grown by Magnetron SputteringM. Molina-Ruiz,K. Shukla,A. Ananyeva,G. Vajente,M. R. Abernathy,T. H. Metcalf, X. Liu,A. Markosyan,R. Bassiri,M. M. Fejer,M. Fazio, L. Yang,C. S. Menoni,F. HellmanPhysical Review Materials（2024）引用 0|浏览17AI 理解论文溯源树样例生成溯源树，研究论文发展脉络Chat Paper正在生成论文摘要
