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Two-Dimensional Electron Gas Isolation Mechanism in Al0.2ga0.8n/Gan Heterostructure by Low-Energy Ar, C, Fe Ion Implantation

Antonino Scandurra, Paolo Ragonese,Cristiano Calabretta, Khadisha Zahra, Liam Soomary,Fabrizio Roccaforte,Giuseppe Greco,Nicolo Piluso,Maria Eloisa Castagna,Ferdinando Iucolano,Andrea Severino,Elena Bruno,Salvo Mirabella

Applied Surface Science（2024）

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关键词
Two-dimensional electron gas,HEMT,Ion implantation,Argon,Carbon,Iron
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