Towards Scalable Synthesis of TiSe2 and VSe2 Thin Films

K. Kadiwala, E. Dipans, L. Dipane, E. Butanovs,B. Polyakov

Latvian Journal of Physics and Technical Sciences（2024）

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Key words

Magnetron sputtering,thin films,titanium diselenide,transition metal dichalcogenides,vanadium diselenide

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