Design and Process of Force-Electric Fusion for Electromagnetic Driven Si Based MEMS S&ASining Lv,Hengzhen Feng,Wenzhong Lou, Chuan Xiao,Wenxing Kan,Wenting Su,Jinkui Wang,Tongan JiJournal of Physics Conference Series(2024)引用 0|浏览4AI 理解论文溯源树样例生成溯源树,研究论文发展脉络Chat Paper正在生成论文摘要