Customized Modulation on Plasma Uniformity by Non-Uniform Magnetic Field in Capacitively Coupled Plasma
PLASMA SCIENCE & TECHNOLOGY（2024）
关键词
COMSOL,capacitively coupled plasma,plasma uniformity,magnetic field
AI 理解论文
溯源树
样例
生成溯源树，研究论文发展脉络
Chat Paper
正在生成论文摘要