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JMEMS Letters.1pt Characterization of a Temperature-Sensitive Nano Piezoelectric Mechanical Resonator With a 20nm Free-Standing Hf$_{0.5}$Zr$_{0.5}$O$_{2}$ Membrane

Jingyi Zhang,Haoqi Lyu,Wuhao Yang,Hai Zhong,Zhuohui Liu,Xiaorui Bie,Xingyin Xiong,Zheng Wang,Chen Ge,Xudong Zou

Journal of Microelectromechanical Systems（2024）

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