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Advances in Microvalve and Micro Pre-concentrator Technology for the Space Atmosphere Monitor Instrument: from Research to the International Space Station

M. Rais-Zadeh, B. Bae,C. Jung-Kubiak,R. Toda,M. Homer, B. Coskun, A. Fisher,A. Shevade,S. Rahiminejad,C. Frez, J. Gill,M. Dickie, C. Malone, D. Fu,S. Madzunkov,M. Darrach

8TH IEEE ELECTRON DEVICES TECHNOLOGY & MANUFACTURING CONFERENCE, EDTM 2024（2024）

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关键词
International Space Station (ISS),mass spectrometer (MS),MEMS,microvalve,space instrument
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