A Single-Chip CMOS-MEMS CMUT Array Transceiver With Low Bias
2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)（2023）
关键词
Transducer,Capacitive Micromachined Ultrasonic Transducer (CMUT),CMOS-MEMS,Array,Monolithic,Transceiver,Pulse-Echo Test
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