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A Structure-Optimized Acoustic Particle Velocity Sensor with Improved Sensitivity and Self-Noise

Wangnan Chen,Zhezheng Zhu,Xu Ma,Lingmeng Yang, Lihao Ma, Wenhua Xu,Chengchen Gao,Yilong Hao,Zhenchuan Yang

2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)（2023）

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Key words
Acoustic particle velocity sensor,thermal convection principle,high sensitivity,high signal-to-noise ratio
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