A Universal Cavity-Based Force Sensor with Reconfigurable Performance for Integration with Thin Film Devices
2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)（2023）
关键词
Universal Force Sensor,Interface Contact Monitoring,Adjustable Performance,Multilayer Structure,Electrophysiological And Electrochemical Sensing
AI 理解论文
溯源树
样例
生成溯源树，研究论文发展脉络
Chat Paper
正在生成论文摘要