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CMOS Scaling for the 5 Nm Node and Beyond: Device, Process and Technology

Henry H. Radamson,Yuanhao Miao,Ziwei Zhou,Zhenhua Wu,Zhenzhen Kong,Jianfeng Gao,Hong Yang,Yuhui Ren,Yongkui Zhang,Jiangliu Shi,Jinjuan Xiang,Hushan Cui, Bin Lu,Junjie Li,Jinbiao Liu,Hongxiao Lin,Haoqing Xu, Mengfan Li, Jiaji Cao, Chuangqi He, Xiangyan Duan,Xuewei Zhao,Jiale Su,Yong Du,Jiahan Yu,Yuanyuan Wu,Miao Jiang,Di Liang,Ben Li,Yan Dong,Guilei Wang

Nanomaterials（2024）

Cited 14|Views51
Key words
CMOS,process integration,nanoscale transistors,FDSOI,GAA,TFET
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