Experimental Investigation on the Back-Gate Modulation of Extra-Thin Body Pmosfets
CONFERENCE OF SCIENCE & TECHNOLOGY FOR INTEGRATED CIRCUITS, 2024 CSTIC（2024）
Key words
Carrier Density,Silicon-on-insulator,Carrier Distribution,Channel Thickness,Back-gate Voltage,Gate Stack,Quantum Field Theory,Thermal Oxidation,Hole Density,Subthreshold Swing,Si Layer,Rapid Thermal Annealing,TCAD Simulation,Thick Si,Decreasing Film Thickness
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