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Sputter Deposition of ZnO–AlN Pseudo-Binary Amorphous Alloys with Tunable Band Gaps in the Deep Ultraviolet Region

Seiichi Urakawa,Wafaa Magdy, Yoshiharu Wada,Ryota Narishige,Kentaro Kaneshima,Naoto Yamashita,Takamasa Okumura,Kunihiro Kamataki,Kazunori Koga,Masaharu Shiratani,Naho Itagaki

Materials Research Express（2024）

Cited 0|Views8
Key words
semiconductor,ultra-wide band gap,amorphous,pseudo-binary alloys,chemical composition,sputtering
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