Nanoscale Investigation of the Effect of Annealing Temperature on the Polarization Switching Dynamics of Hf0.5Zr0.5O2 Thin Films
Advanced Materials Interfaces（2024）
关键词
annealing temperature,ferroelectricity,Hf0.5Zr0.5O2, oxygen vacancy,piezoresponse force microscopy,polarization switching speed
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