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Development of a Broadband Photodetector Utilizing ZnO Nanorods with Grating Structure Fabricated Via Nanoimprint Lithography

Ming-Hsien Li, Jyun-Jie Chen, Yi-Sheng Chen, Ssu-Ting Lin,Bo -Hong Lin,Ming-Yu Kuo,Chun-Hung Lin,Hsiang Chen,Jung Han

SENSORS AND ACTUATORS A-PHYSICAL（2024）

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Key words
Nanoimprint lithography,Grating structure,ZnO nanorods,Broadband photodetectors
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