Development of Silicon Interposers with Embedded Microchannels and Metal Re-distribution Layer for the Integration of Hybrid Detector Systems
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT（2024）
关键词
Silicon interposers,Microchannel cooling,Embedded microchannels,Heterogeneous integration,Fluidic interposer
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