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Effect of Stress Control by Growth Adjustment on the Edge Thread Dislocation Density of AlN Grown on the Sapphire

Yuheng Zhang,Jing Yang, Feng Liang,Zongshun Liu,Yufei Hou,Bing Liu,Fu Zheng, Xuefeng Liu,Degang Zhao

SEMICONDUCTOR SCIENCE AND TECHNOLOGY（2024）

Cited 1|Views7
Key words
AlN,growth stress,edge dislocation,mechanical calculations
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