State-of-the-Art Materials Used in MEMS Micromirror Arrays for Photonic Applications

Shujie Liu,Philipp Kaestner,Roland Donatiello,Anup Shrivastava,Marek Smolarczyk,Mustaqim Siddi Que Iskhandar,Md Kamrul Hasan, Giuseppe Caruso, Jiahao Chen,Basma Elsaka, Shilby Baby,Dennis Loeber,Thomas Kusserow,Jost Adam,Hartmut Hillmer

Photonics（2024）

Cited 5|Views4

Key words

smart glass,sensorics,safety,metallic mirrors,dielectric mirrors,semiconductor mirrors,2D materials,light steering,wavelength tuning,spectroscopy,miniaturization potential

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