Integration of Through-Sapphire Substrate Machining with Superconducting Quantum Processors

Narendra Acharya, Robert Armstrong, Yashwanth Balaji, Kevin G. Crawford,James C. Gates,Paul C. Gow,Oscar W. Kennedy, Renuka Devi Pothuraju, Kowsar Shahbazi,Connor D. Shelly

ADVANCED MATERIALS（2025）

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Key words

dielectric,Josephson junctions,machining,nanofabrication,qubits

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