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High Linearity AlGaN/GaN HEMTs with Au-free Ti/Al/Ni/Ti Ohmic Contacts for Ka-band Applications

Che-Wei Hsu,Yueh-Chin Lin, Shao-Lun Lee,Kai-Wen Chen, Ying-Ciao Chen,Edward Yi Chang

APPLIED PHYSICS EXPRESS（2024）

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Key words
AlGaN/GaN HEMTs,Au-free,Ti/Al/Ni/Ti ohmic contacts,linearity,Ka-band
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