Design and Fabrication of 2.5D Cryogenic Interposer with Integrated Superconducting TSVs and Resonators
PROCEEDINGS OF THE IEEE 74TH ELECTRONIC COMPONENTS AND TECHNOLOGY CONFERENCE, ECTC 2024（2024）
关键词
2.5D cryogenic interposer,Tc of the interposer,Transmission at cryogenic temperature,resonators
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