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Configurable and Intelligent Switched CMOS Current Driver Powering Arrays of Electrothermal Actuators for MEMS Switches

2024 IEEE INTERNATIONAL SYMPOSIUM ON CIRCUITS AND SYSTEMS, ISCAS 2024(2024)

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Key words
Driving circuit,MEMS,electrothermal actuator,CMOS,BCD,constant current mode,switch network,timing control,diagnostic circuitry
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