Configurable and Intelligent Switched CMOS Current Driver Powering Arrays of Electrothermal Actuators for MEMS Switches
2024 IEEE INTERNATIONAL SYMPOSIUM ON CIRCUITS AND SYSTEMS, ISCAS 2024(2024)
Key words
Driving circuit,MEMS,electrothermal actuator,CMOS,BCD,constant current mode,switch network,timing control,diagnostic circuitry
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