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Monolithic Heterogeneous Integration of Si(100)/GaN CMOS Inverters and Normally-Off GaN Power Devices for High Switching Frequency and High Power Applications

Yutong Fan,Xi Liu,Weihang Zhang,Yinhe Wu,Zhihong Liu,Chunfu Zhang,Yang Jiang,Pui-In Mak,Yue Hao,Jincheng Zhang

2024 36TH INTERNATIONAL SYMPOSIUM ON POWER SEMICONDUCTOR DEVICES AND IC S, ISPSD 2024（2024）

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Key words
GaN,Si,CMOS,Monolithic Integration,MOSFET,Inverter,Breakdown Voltage,Logic Integrated Circuit
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