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Process Development and Validation of Next Generation 3D Calibration Standards for Application in Optical Microscopy

Celina Hellmich, Lena Heinrich,Matthias Hemmleb,Sebastian Buetefisch,Thomas Weimann,Stefanie Kroker

MEASUREMENT SCIENCE AND TECHNOLOGY（2024）

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关键词
3D standards,CLSM,3D calibration,metrology,wafer based process
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