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Machine Learning-Based Prediction of the Electron Energy Distribution Function and Electron Density of Argon Plasma from the Optical Emission Spectra

Fatima Jenina Arellano,Minoru Kusaba,Stephen Wu,Ryo Yoshida,Zoltan Donko,Peter Hartmann,Tsanko V. Tsankov,Satoshi Hamaguchi

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films（2024）

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