Development of APCVD BSG and POCl3 Codiffusion Process for Double-Side TOPCon Solar Cell Precursor Fabrication
IEEE JOURNAL OF PHOTOVOLTAICS（2024）
Key words
Atmospheric pressure chemical vapor deposition (APCVD),codiffusion,device simulation,ex situ doping,low pressure chemical vapor deposition (LPCVD),passivated contacts,tunnel oxide passivating contact (TOPCon),Atmospheric pressure chemical vapor deposition (APCVD),codiffusion,device simulation,ex situ doping,low pressure chemical vapor deposition (LPCVD),passivated contacts,tunnel oxide passivating contact (TOPCon)
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