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Reversible Laser Imprinting of Phase Change Photonic Structures in Integrated Waveguides.

Evgenii Menshikov,Petr Lazarenko,Vadim Kovalyuk,Sergey Dubkov, Nadezhda Maslova, Alexey Prokhodtsov, Alexander Vorobyov,Sergey Kozyukhin,Gregory Goltsman,Ivan S. Sinev

ACS APPLIED MATERIALS & INTERFACES（2024）

Cited 2|Views11
Key words
phase change materials,laser-induced periodic surfacestructures,integrated photonics,silicon nitride,GeSbTe,tunable photonics
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